JPH0356825Y2 - - Google Patents

Info

Publication number
JPH0356825Y2
JPH0356825Y2 JP8147984U JP8147984U JPH0356825Y2 JP H0356825 Y2 JPH0356825 Y2 JP H0356825Y2 JP 8147984 U JP8147984 U JP 8147984U JP 8147984 U JP8147984 U JP 8147984U JP H0356825 Y2 JPH0356825 Y2 JP H0356825Y2
Authority
JP
Japan
Prior art keywords
bellows
membrane
fixed support
clean room
membrane body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8147984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS60193291U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8147984U priority Critical patent/JPS60193291U/ja
Publication of JPS60193291U publication Critical patent/JPS60193291U/ja
Application granted granted Critical
Publication of JPH0356825Y2 publication Critical patent/JPH0356825Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Cleaning In General (AREA)
  • Prevention Of Fouling (AREA)
JP8147984U 1984-06-01 1984-06-01 クリ−ンル−ム Granted JPS60193291U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8147984U JPS60193291U (ja) 1984-06-01 1984-06-01 クリ−ンル−ム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8147984U JPS60193291U (ja) 1984-06-01 1984-06-01 クリ−ンル−ム

Publications (2)

Publication Number Publication Date
JPS60193291U JPS60193291U (ja) 1985-12-23
JPH0356825Y2 true JPH0356825Y2 (en]) 1991-12-24

Family

ID=30628297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8147984U Granted JPS60193291U (ja) 1984-06-01 1984-06-01 クリ−ンル−ム

Country Status (1)

Country Link
JP (1) JPS60193291U (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148382A (ja) * 1987-12-02 1989-06-09 Hanwa:Kk 保温材微粉末の飛散、拡散防止方法

Also Published As

Publication number Publication date
JPS60193291U (ja) 1985-12-23

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